TM CVD Processes in Ar+H2+SiH4+C2H6 and Dopant Gas Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. Plasma production using rotating mode radial line slot ...
The plasma produced by a radial line slot antenna (RLSA) source is discussed based on a simulation using a multiphysics coupled 2D fluid model. The technological aspects in a silicon nitride chemical vapor deposition (CVD) process using a disilane and ammonia mixture are addressed.
Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. Radial Line Slot Antenna - Chiba U A radial line slot antenna (RLSA) is a slotted waveguide planar array proposed for DBS subscriber antennas. Predicted conductor loss of RLSA is almost negligible. A single-layered RLSA (SL-RLSA) has the simplest structure. TEL Release TriasTM SPA Plasma Processing System Capable
The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies.
The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window. The plasma is typically comprised of inert gases like argon and mixtures of halogen or fluorocarbon gases for etching. TEL Release TriasTM SPA Plasma Processing System Capable ... Based on the Radial Line Slot Antenna (RLSA) microwave plasma developed for semiconductor processes by Professor Tadahiro Ohmi at Tohoku University, the Trias SPA uses the unique Slot Plane Antenna (SPA) plasma generating technology established by TEL, after long years of cultivating plasma technology. TM CVD Processes in Ar+H2+SiH4+C2H6 and Dopant Gas Abstract: The plasma reactor with radial line slot antenna (RLSATM), a planar microwave (2.45 GHz) plasma source, is used in etch and deposition technology, typically in reactive rich gaseous environment, and for processes that are sensitive to plasma damage. Besides a strict uniformity control, the plasma chemistry is Radial Line Slot Antenna - Chiba U
TEL Release TriasTM SPA Plasma Processing System Capable…
Trials of RF plasma production using different antenna ... Trials of RF plasma production using different antenna geometries with magnetic field Shunjiro Shinoharayand Tsutomu Soejima Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816-8580, Japan Received 1 June 1998, in final form 18 September 1998 Abstract. Plasma production studies excited by the ...
A T-antenna, T-aerial, flat-top antenna, or top-hat antenna is a capacitively loaded monopole wire radio antenna [1] used in the VLF, LF, MF and shortwave bands. [2] [3] [4] T-antennas are widely used as transmitting antennas for amateur …
US9852893B2 - Dipole ring magnet assisted microwave radial ...
Phase shifting plasma electromagnetic waveguides and plasma electromagnetic coaxial waveguides, as well as plasma waveguide horn antennas, each of which can be reconfigurable, durable, stealth, and flexible are disclosed. Radioengineering - June 2016, Volume 25, Number 2 [DOI: 10… From this concepts, when all plasma elements are activated or switched to ON, the radiation signal from monopole antenna will trapped inside the plasma blanket and meanwhile when one or more plasma elements is deactivated (switched OFF … US6870517B1 - Configurable arrays for steerable antennas and… The reconfigurable array is combined with a transmitting antenna to make a steerable antenna. The reconfigurable array surrounds the transmitting antenna and reflects all transmissions except on selected radials where apertures in the … US7276990B2 - Single-pole multi-throw switch having low… No. 6,252,473 issued Jun. 26, 2001 and assigned to Hughes Electronics Corporation. This patent describes a waveguide switch using bulk mechanical actuators.